LPPE Description
Methods
Types
Processes
 


METHODS for the TYPE CVD

AP-CVD
Atmospheric Pressure Chemical Vapour Deposition
LP-CVD
Low Pressure Chemical Vapour Deposition
AP-CVD
Atmospheric Pressure

Chemical Vapour Deposition
APPE-CVD
Atmospheric Pressure
Plasma Enhanced
Chemical Vapour Deposition
LP-CVD
Low Pressure

Chemical Vapour Deposition
LPPE-CVD
Low Pressure
Plasma Enhanced
Chemical Vapour Deposition
We divide the type CVD in 4 METHODS. But the method we are studying is only the method LPPE (LPPE-CVD).

Note: PE = Plasma Enhanced: sometimes also mentioned as PA = Plasma Assisted



METHODS for the TYPE VPE

LP-VPE
Low Pressure Vapour Phase Epitaxy
LP-VPE
Low Pressure

Vapour Phase Epitaxy
LPPE-VPE
Low Pressure
Plasma Enhanced
Vapour Phase Epitaxy



METHODS for the TYPE ALD
LP-ALD
Low Pressure Atomic Layer Deposition
LP-ALD
Low Pressure

Atomic Layer Deposition
LPPE-ALD
Low Pressure
Plasma Enhanced
Atomic Layer Deposition

 

METHODS for the TYPE VPD
LP-VPD
Low Pressure Vapor Phase Deposition
LP-ALD
Low Pressure

Vapor Phase Deposition
LPPE-ALD
Low Pressure
Plasma Enhanced
Vapor Phase Deposition

 

 

 

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