NANOPOSITIONING

 

Model Brand Type
       
11 P-363.3UD Physik Instrumente Nanopositioning Tool (vacuum conditions)
       

 

Technical Data P-363.3UD
Cod.
UM
valore
Note
 
 
Close Loop Travel (axis Z)
CLT
µ
+-2,7
 
Close Loop Travel (axis X and axis Y)
CLT
µ
+-2,5
 
Close Loop Resolution
CLR
nm
0,1
 
tempo di spostamento con passo da 0,1 nm
msec
2,0
 
tempo di spostamento con passo da 20 nm  
msec
2,4
 
 
 





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