Low pressure gas |
Pressure IN relative bar |
Filter µ |
Pressur gauge in |
Regu lator |
Pressur
gauge out |
Pressure OUT relative bar |
Note |
|||
Max |
Working |
Max |
Working |
|||||||
Hydrogen |
H2 | 17,2 |
10,0 |
0,5 |
yes |
yes |
yes |
6,8 |
3,0 |
reactive gas for process |
Helium | He | 17,2 |
10,0 |
0,5 |
yes |
yes |
yes |
6,8 |
3,0 |
inert gas for process |
Argon | Ar | |||||||||
Oxygen |
O2 | 17,2 |
10,0 |
0,5 |
yes |
yes |
yes |
6,8 |
3,0 |
reactive gas for process |
Nitrogen | N2 | 17,2 |
10,0 |
0,5 |
yes |
yes |
yes |
6,8 |
3,0 |
1) per messa in aria nei processi del reattore 2) per purge pompa rotativa 3) per messa in aria Glovebox |
Air (78%N2+21%O2+ 0,9%Ar+0,1%CO2) |
8,0 |
6,0 |
0,5 |
no |
no |
yes |
8,0 |
6,0 |
1) per messa in aria nelle prove del reattore 2) per comando valvole VAT 3) per pistola di pulizia |