Gas
 

GAS

Point of Use

Device on Reactor
Gas
In state
Conver
sion
factor

Out max
in bar

working
pressure
in bar
In max
in bar
Name of Device
Differential pressure
in bar
Out max
in sccm
Out min
in sccm
Out state
from
to
 
 
 
 
 
Air
Gas
 
8,0
6,0
Entrance chamber for flushing
in Air
Gas
8,0
Pneumatic valves
 
Nitrogen
Gas
1,000
6,8
3,0
Entrance chamber for flushing
in Nitrogen
Gas
6,8
Pressure for liquid precursor
 
We use Flowmeter 1 for Nitrogen, even if Flowmeter 1 has been calibrated for Oxygen, because the conversion factors of Nitrogen and Oxygen are similar (and Nitrogen and Oxygen can be mixed)
Gas
Oxygen
Gas
0,993
6,8
3,0
6,8
Flowmeter 1 (MKS 1179B)
calibrated for Oxygen
0,7
3,8
200
10
Gas
Argon
Gas
1,390
6,8
3,0
6,8
Flowmeter 2 (MKS 1179B)
calibrated for Argon
0,7
3,8
200
10
Gas
Helium
Gas
1,450
6,8
3,0
We use Flowmeter 2 for Helium, even if Flowmeter 2 has been calibrated for Argon, because the conversion factors of Helium and Argon are similar (and Argon and Helium can be mixed)
Gas
Hydrogen
Gas
1,010
6,8
3,0
6,8
Flowmeter 3 (MKS 1179B)
calibrated for Hydrogen
0,7
3,8
200
10
Gas

Shuttle

Device on Reactor
Precursor
In state
Out max in relative bar
In max in relative bar
Name of Device
Differential pressure in bar
Out max in l/hr
Out min in l/hr
Out state
from
to
 
           
TiCl4
Liquid
6,8
6,8
Flowmeter (Quantim QMBC) for liquid precursor
0,7
10,3
0,30
0,01
Gas


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