Project: A3-Plasma Treatment of SiC
(with AcCVD)
Project accomplished


This project of Plasma Etching has been developed in favour of the IMEM-CNR institute of Parma
and is part of a bigger project of the same Institute.
The work has been presented at the European Conference on Silicon Carbide and Related Materials
in Saint-Petersburg - Russia, from 2 to 6 September 2012.
Then it has been published on the Materials Science Forum, Trans Tech Publication,
Vols.740-742 (2013) pp.287-290, with the title "Plasma Treatment of 3C-SiC Surfaces".



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